18141013. LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
Contents
- 1 LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Original Abstract Submitted
LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME
Organization Name
Inventor(s)
LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 18141013 titled 'LIGHT IRRADIATION APPARATUS, SUBSTRATE DEBONDING SYSTEM INCLUDING THE SAME, AND SUBTRATED DEBONDING METHOD USING THE SAME
Simplified Explanation
The patent application describes a light irradiation apparatus with a stage for supporting a substrate and a LED module with LEDs arranged in different directions.
- LED module with LEDs arranged in first and second directions
- Stage for supporting a substrate
- LEDs spaced apart from the stage
- First direction and second direction intersecting
Potential Applications
The technology could be used in:
- Semiconductor manufacturing
- Photolithography processes
- Printed circuit board production
Problems Solved
This technology helps to:
- Improve uniformity of light distribution
- Enhance efficiency of light irradiation
- Increase productivity in manufacturing processes
Benefits
The benefits of this technology include:
- Precise control of light exposure
- Reduction in energy consumption
- Enhanced quality of finished products
Original Abstract Submitted
A light irradiation apparatus including a stage configured to support a substrate; and a light emitting diode (LED) module spaced apart from the stage, wherein the LED module includes a plurality of LEDs, wherein some of the plurality of LEDs are arranged in a first direction, and wherein others of the plurality of LEDs are provided in a second direction, the second direction intersecting the first direction.
