18117259. WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICONDUCTOR PROCESSING SYSTEM INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICONDUCTOR PROCESSING SYSTEM INCLUDING THE SAME
Organization Name
Inventor(s)
Beomsoo Hwang of Suwon-si (KR)
WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICONDUCTOR PROCESSING SYSTEM INCLUDING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 18117259 titled 'WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICONDUCTOR PROCESSING SYSTEM INCLUDING THE SAME
Simplified Explanation
The patent application describes a wafer transfer apparatus that includes a controller, a wafer transfer robot with a hand unit to hold a wafer, a driving unit to move the wafer, and a sensor unit provided on the driving unit. There are also multiple transfer structures that can exchange the wafer with the robot, and each structure has markers recognizable by the sensor unit. The sensor unit consists of a camera sensor to recognize the markers and a laser sensor to measure distances to the markers by emitting and receiving a laser.
- The wafer transfer apparatus includes a robot with a hand unit to hold and move wafers, and a sensor unit to detect markers on the transfer structures.
- The transfer structures have markers that can be recognized by the sensor unit, allowing for accurate positioning and exchange of wafers.
- The sensor unit includes a camera sensor to recognize the markers and a laser sensor to measure distances to the markers.
- The laser sensor emits a laser to the markers and measures the reflected laser to determine the distances.
- The apparatus is controlled by a controller, ensuring precise and efficient wafer transfer operations.
Potential applications of this technology:
- Semiconductor manufacturing: The wafer transfer apparatus can be used in semiconductor manufacturing processes to accurately and efficiently transfer wafers between different stages of production.
- Electronics assembly: The apparatus can also be applied in electronics assembly processes, where wafers or electronic components need to be transferred between different machines or workstations.
Problems solved by this technology:
- Accurate wafer transfer: The use of markers and sensors allows for precise positioning and exchange of wafers, reducing the risk of damage or misalignment during transfer.
- Efficient operations: The automated wafer transfer robot and the ability to recognize markers enable faster and more efficient wafer handling, improving overall productivity.
Benefits of this technology:
- Improved accuracy: The use of markers and sensors ensures precise positioning and exchange of wafers, minimizing errors and improving the quality of the manufacturing process.
- Increased efficiency: The automated wafer transfer robot and the ability to recognize markers enable faster and more efficient wafer handling, reducing production time and costs.
- Enhanced productivity: The combination of accurate and efficient wafer transfer operations leads to increased productivity in semiconductor manufacturing and electronics assembly processes.
Original Abstract Submitted
A wafer transfer apparatus includes a controller, a wafer transfer robot including a hand unit configured to hold a wafer, a driving unit connected to the hand unit and configured to move the wafer, and a sensor unit provided on the driving unit, and a plurality of transfer structures configured to exchange the wafer with the wafer transfer robot, each of the plurality of transfer structures including a plurality of markers recognizable by the sensor unit, where the sensor unit includes a camera sensor recognizing the plurality of markers and a laser sensor configured to measure distances to the plurality of markers by emitting a laser to the plurality of markers and receiving the laser reflected from the plurality of markers.
