18058917. IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

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IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

Organization Name

CANON KABUSHIKI KAISHA

Inventor(s)

Yushi Yamakawa of Tochigi (JP)

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 18058917 titled 'IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

Simplified Explanation

The present invention is an imprint apparatus that includes a mold holding unit, a moving body, a detecting unit, a measuring unit, and a controller.

  • The mold holding unit holds a mold and is movable.
  • The moving body holds a substrate and is also movable.
  • The detecting unit detects the position of mold-side marks on the mold and substrate-side marks on the substrate.
  • The measuring unit measures the relative position between the mold holding unit and the moving body.
  • The controller controls the movement of the moving body based on the detection by the detecting unit when performing an imprint process in a normal shot region.
  • The controller also controls the movement of the moving body based on the measurement by the measuring unit when performing an imprint process in a deficient shot region.

Potential applications of this technology:

  • Semiconductor manufacturing: This imprint apparatus can be used in the fabrication of semiconductor devices, where precise alignment and positioning of the mold and substrate are crucial.
  • Nanotechnology: The imprint apparatus can be utilized in the production of nanostructures, such as nanowires or nanoscale patterns, where high accuracy and repeatability are required.
  • Optics and photonics: This technology can be applied in the manufacturing of optical components, such as lenses or diffraction gratings, where precise alignment is essential for optimal performance.

Problems solved by this technology:

  • Ensures accurate alignment: The detecting unit and measuring unit work together to ensure precise alignment between the mold and substrate, even in deficient shot regions.
  • Improves yield and quality: By controlling the movement of the moving body based on the detection or measurement results, the imprint process can be performed accurately, leading to higher yield and improved quality of the final product.
  • Reduces production costs: The ability to perform imprint processes in deficient shot regions reduces the need for discarding substrates with minor defects, resulting in cost savings in the manufacturing process.

Benefits of this technology:

  • Enhanced precision: The combination of the detecting unit and measuring unit allows for precise alignment and positioning of the mold and substrate, resulting in high accuracy in the imprint process.
  • Increased efficiency: The controller's ability to control the movement of the moving body based on the detection or measurement results ensures efficient and optimized imprint processes.
  • Cost-effective manufacturing: By reducing the need for discarding substrates with minor defects, this technology helps to minimize production costs and improve overall profitability.


Original Abstract Submitted

The imprint apparatus according to the present invention includes a mold holding unit configured to be movable with holding a mold, a moving body configured to be movable with holding a substrate, a detecting unit configured to detect a position of mold-side marks formed in a pattern region of the mold and a position of substrate-side marks formed in a shot region on the substrate, a measuring unit configured to measure a relative position between the mold holding unit and the moving body, and a controller configured to control a movement of the moving body based on a result of the detection by the detecting unit when an imprint process is performed in a normal shot region, and to control the movement of the moving body based on a result of the measurement by the measuring unit when the imprint process is performed in a deficient shot region.

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