17992421. APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE simplified abstract (Samsung Display Co., Ltd.)
APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE
Organization Name
Inventor(s)
Kyungbok Kim of Yongin-si (KR)
Daeil Kim of Pyeongtaek-si (KR)
Jaekeun Kim of Pyeongtaek-si (KR)
Kwangjong Yoo of Pyeongtaek-si (KR)
Changnam Choi of Pyeongtaek-si (KR)
APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE - A simplified explanation of the abstract
This abstract first appeared for US patent application 17992421 titled 'APPARATUS AND METHOD OF MANUFACTURING DISPLAY DEVICE
Simplified Explanation
The abstract describes an apparatus and method for manufacturing a display device. The apparatus includes a plasma generator, an adapter, a cooler, an insulator, and a diffuser. The plasma generator is located outside a chamber and is connected to the chamber through the adapter. The cooler, insulator, and diffuser are all connected in a flow path that supplies plasma generated by the plasma generator into the chamber.
- The apparatus includes a plasma generator, adapter, cooler, insulator, and diffuser.
- The plasma generator is located outside the chamber.
- The adapter connects the plasma generator to the chamber.
- The cooler is connected to the adapter.
- The insulator is connected to the cooler.
- The diffuser is connected to the insulator.
- Plasma generated by the plasma generator is supplied into the chamber through the flow path passing through the adapter, cooler, insulator, and diffuser.
Potential Applications
- Manufacturing of display devices
- Plasma generation for various industrial processes
Problems Solved
- Efficient supply of plasma into a chamber
- Improved cooling of the plasma generator
- Enhanced insulation and diffusion of plasma
Benefits
- Improved manufacturing efficiency
- Better control and distribution of plasma
- Increased reliability and lifespan of the plasma generator
Original Abstract Submitted
An apparatus and a method for manufacturing a display device are provided. The apparatus includes a plasma generator disposed outside a chamber, an adapter of the chamber, the adapter connecting the plasma generator to the chamber, a cooler connected to the adapter, an insulator connected to the cooler, and a diffuser connected to the insulator. A plasma generated by the plasma generator is supplied into the chamber through a flow path passing through the adapter, the cooler, the insulator, and the diffuser.
- Samsung Display Co., Ltd.
- Daesoo Kim of Yongin-si (KR)
- Kyungbok Kim of Yongin-si (KR)
- Sanggab Kim of Yongin-si (KR)
- Juhee Lee of Yongin-si (KR)
- Daewon Choi of Yongin-si (KR)
- Daeil Kim of Pyeongtaek-si (KR)
- Jaekeun Kim of Pyeongtaek-si (KR)
- Kwangjong Yoo of Pyeongtaek-si (KR)
- Changnam Choi of Pyeongtaek-si (KR)
- Hyunku Park of Yongin-si (KR)
- Yunjong Yeo of Yongin-si (KR)
- H01J37/32
- H01L27/12
- H10K71/00