View source for 17962310. HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS simplified abstract (Applied Materials, Inc.)

=HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS=


==Organization Name==

[[:Category:Applied Materials, Inc.|Applied Materials, Inc.]]


[[Category:Applied Materials, Inc.]]

==Inventor(s)==

[[:Category:Amir H. Tavakoli of San Jose CA (US)|Amir H. Tavakoli of San Jose CA (US)]][[Category:Amir H. Tavakoli of San Jose CA (US)]]

[[:Category:Ala Moradian of Sunnyvale CA (US)|Ala Moradian of Sunnyvale CA (US)]][[Category:Ala Moradian of Sunnyvale CA (US)]]

[[:Category:Tetsuya Ishikawa of San Jose CA (US)|Tetsuya Ishikawa of San Jose CA (US)]][[Category:Tetsuya Ishikawa of San Jose CA (US)]]

==HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS - A simplified explanation of the abstract==


This abstract first appeared for US patent application 17962310 titled 'HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS

==Simplified Explanation==

The patent application describes a coating for a processing chamber component that includes a metallic bond layer, a thermal barrier layer, and a ceramic sealing layer resistant to halogen-containing chemicals.

* Metallic bond layer deposited on component surface
* Thermal barrier layer deposited on bond layer
* Non-porous ceramic sealing layer deposited on thermal barrier layer
* Sealing layer conforms to surface irregularities
* Sealing layer chemistry selected for resistance to halogen-containing chemicals

== Potential Applications ==
The technology could be applied in semiconductor manufacturing, chemical processing, and other industries where components are exposed to harsh chemical environments.

== Problems Solved ==
The coating provides protection against corrosion and chemical attack, extending the lifespan of processing chamber components and improving overall equipment performance.

== Benefits ==
- Increased component durability
- Enhanced resistance to halogen-containing chemicals
- Improved reliability and efficiency of processing equipment

== Potential Commercial Applications ==
"Chemical Resistant Coating for Processing Chamber Components" - Ideal for manufacturers of semiconductor equipment, chemical processing plants, and other industries requiring durable and chemically resistant components.

== Possible Prior Art ==
There may be prior art related to coatings for processing chamber components, but specific information on similar technologies is not provided in the patent application.

=== Unanswered Questions ===

== How does the coating affect the thermal properties of the processing chamber component? ==
The patent application does not detail the impact of the coating on the thermal conductivity or heat dissipation of the component.

== Are there any limitations to the types of surfaces that can be coated with this technology? ==
The patent application does not address whether certain materials or surface finishes may be incompatible with the coating process.


==Original Abstract Submitted==

A coating on a processing chamber component includes a metallic bond layer deposited on a surface of the component. A thermal barrier layer is deposited on the bond layer. A substantially non-porous ceramic sealing layer is deposited on the thermal barrier layer. The sealing layer substantially conforms to irregularities of the surface of the thermal barrier layer. A chemistry of the sealing layer is selected for resistance to attack from halogen-containing chemicals.



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