18354191. LOAD PORT MODULE AND DRIVING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)
Contents
- 1 LOAD PORT MODULE AND DRIVING METHOD THEREOF
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 LOAD PORT MODULE AND DRIVING METHOD THEREOF - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
LOAD PORT MODULE AND DRIVING METHOD THEREOF
Organization Name
Inventor(s)
Sang Lyong Shin of Suwon-si (KR)
LOAD PORT MODULE AND DRIVING METHOD THEREOF - A simplified explanation of the abstract
This abstract first appeared for US patent application 18354191 titled 'LOAD PORT MODULE AND DRIVING METHOD THEREOF
Simplified Explanation
The patent application describes a load port module that includes a mounting table for receiving a container with a substrate, a door opener for opening and closing the container door, an image generator for capturing images of the substrate at different angles, and a controller for analyzing the images to determine warpage and alignment of the substrate.
- The load port module includes a mounting table for holding a container with a substrate.
- A door opener is used to open and close the container door.
- An image generator captures images of the substrate at different angles.
- A controller analyzes the images to determine warpage and alignment of the substrate.
Potential Applications
This technology could be applied in semiconductor manufacturing processes where precise alignment and inspection of substrates are crucial.
Problems Solved
This technology helps in detecting warpage and ensuring proper alignment of substrates, which is essential for high-quality manufacturing processes.
Benefits
The load port module allows for accurate analysis of substrate warpage and alignment, leading to improved manufacturing efficiency and product quality.
Potential Commercial Applications
This technology could be utilized in the semiconductor industry for wafer handling and inspection processes.
Possible Prior Art
Prior art may include similar load port modules used in semiconductor manufacturing for substrate handling and inspection.
Unanswered Questions
How does the load port module communicate with other equipment in the manufacturing process?
The article does not provide information on the communication protocols or interfaces used by the load port module to interact with other machinery.
What is the cost-effectiveness of implementing this technology in manufacturing facilities?
The article does not discuss the cost implications or return on investment of integrating this load port module into manufacturing operations.
Original Abstract Submitted
A load port module includes: a mounting table configured to receive a container, wherein the container is configured to receive a substrate therein; a door opener is configured to open and close a door of the container; an image generator is on the door opener, and the image generator is configured to generate a first image of the substrate at a first angle with respect to the substrate, and a second image of the substrate at a second angle with respect to the substrate different from the first angle; and a controller is configured to determine warpage of the substrate based on the first image and to determine alignment of the substrate based on the second image.
