Samsung display co., ltd. (20240131555). DEPOSITION APPARATUS simplified abstract
Contents
DEPOSITION APPARATUS
Organization Name
Inventor(s)
MINCHUL Song of Yongin-si (KR)
YOUNGSUN Cho of Yongin-si (KR)
DEPOSITION APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240131555 titled 'DEPOSITION APPARATUS
Simplified Explanation
The deposition apparatus described in the abstract is a device used for depositing material onto a target substrate with precision and control. Here is a simplified explanation of the patent application:
- Support module with multiple support parts connected to the target substrate
- Base substrate attached to the support module
- Connection member linking the support parts to the base substrate
- Mask assembly to mask the deposition material on the target substrate
- Position control parts in the support module for moving the support parts along a perpendicular axis
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- Potential Applications
The technology could be used in the semiconductor industry for thin film deposition processes, photovoltaic cell manufacturing, and microelectronics production.
- Problems Solved
This technology solves the problem of accurately depositing material onto a target substrate with precise control and positioning.
- Benefits
The benefits of this technology include improved deposition accuracy, increased efficiency in material usage, and enhanced quality of the deposited material.
- Potential Commercial Applications
The technology could be applied in industries such as electronics manufacturing, solar panel production, and optical coatings.
- Possible Prior Art
One possible prior art could be similar deposition apparatus used in the semiconductor industry for thin film deposition processes.
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- Unanswered Questions
- How does the position control system ensure precise movement of the support parts along the perpendicular axis?
The abstract does not provide detailed information on the specific mechanism used for position control in the support module.
- What materials can be deposited using this apparatus?
The abstract does not specify the types of materials that can be deposited using this deposition apparatus.
Original Abstract Submitted
a deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. the support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.
