Tokyo Electron Limited patent applications published on April 11th, 2024
Contents
- 1 Patent applications for Tokyo Electron Limited on April 11th, 2024
- 1.1 SUBSTRATE PROCESSING APPARATUS (18483050)
- 1.2 FILM FORMING APPARATUS AND FILM FORMING METHOD (18477060)
- 1.3 METHOD FOR SETTING UP TEST APPARATUS AND TEST APPARATUS (18264319)
- 1.4 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD (18392294)
- 1.5 PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD (18274808)
- 1.6 System and Method for Plasma Process Uniformity Control (17961335)
- 1.7 PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS (18477047)
- 1.8 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18263920)
- 1.9 SUBSTRATE PROCESSING APPARATUS (18372995)
- 1.10 PLASMA PROCESSING APPARATUS AND CLEANING METHOD (18544468)
- 1.11 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (18389827)
- 1.12 SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS (17961601)
- 1.13 SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM (18473459)
- 1.14 APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE (18273446)
- 1.15 SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD (18376512)
- 1.16 SHIFTED MULTI-VIA CONNECTION FOR HYBRID BONDING (18373098)
- 1.17 3D NANOSHEET STACK WITH DUAL SELECTIVE CHANNEL REMOVAL OF HIGH MOBILITY CHANNELS (17962233)
- 1.18 HIGH PERFORMANCE 3D CHANNELS WITH UPSILON NANOSHEETS (17962222)
- 1.19 SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF (17962235)
- 1.20 MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM (18480575)
Patent applications for Tokyo Electron Limited on April 11th, 2024
SUBSTRATE PROCESSING APPARATUS (18483050)
Main Inventor
Masato KADOBE
FILM FORMING APPARATUS AND FILM FORMING METHOD (18477060)
Main Inventor
Yasunobu SUZUKI
METHOD FOR SETTING UP TEST APPARATUS AND TEST APPARATUS (18264319)
Main Inventor
Shinjiro WATANABE
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD (18392294)
Main Inventor
Chishio KOSHIMIZU
PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD (18274808)
Main Inventor
Masaharu SHIRATANI
System and Method for Plasma Process Uniformity Control (17961335)
Main Inventor
Sergey Voronin
PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS (18477047)
Main Inventor
Yusuke KIKUCHI
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18263920)
Main Inventor
Makoto WADA
SUBSTRATE PROCESSING APPARATUS (18372995)
Main Inventor
Ryosuke GUNJI
PLASMA PROCESSING APPARATUS AND CLEANING METHOD (18544468)
Main Inventor
Kazuki TSUCHIYA
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (18389827)
Main Inventor
Hironari SASAGAWA
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS (17961601)
Main Inventor
Keisuke TSUGAO
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM (18473459)
Main Inventor
Shinichiro KAWAKAMI
APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE (18273446)
Main Inventor
Takehiro SHINDO
SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD (18376512)
Main Inventor
Isamu TAODA
SHIFTED MULTI-VIA CONNECTION FOR HYBRID BONDING (18373098)
Main Inventor
Kevin RYAN
3D NANOSHEET STACK WITH DUAL SELECTIVE CHANNEL REMOVAL OF HIGH MOBILITY CHANNELS (17962233)
Main Inventor
H. Jim Fulford
HIGH PERFORMANCE 3D CHANNELS WITH UPSILON NANOSHEETS (17962222)
Main Inventor
Mark I. Gardner
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF (17962235)
Main Inventor
H. Jim Fulford
MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM (18480575)
Main Inventor
Youichi MASAKI