18138771. SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE TRANSFER METHOD simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE TRANSFER METHOD
Organization Name
Inventor(s)
Jeongjae Bang of Suwon-si (KR)
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE TRANSFER METHOD - A simplified explanation of the abstract
This abstract first appeared for US patent application 18138771 titled 'SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE TRANSFER METHOD
Simplified Explanation
The abstract describes a substrate transfer device that includes a housing, a carrier for storing a substrate, a carrier lifter for vertical movement of the carrier, a vertical stabilization unit to reduce vertical vibration, a rotation stabilization unit to reduce rotation, and a carrier holder to hold the carrier. The vertical stabilization unit consists of an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer between them that contracts or relaxes to reduce vertical vibration.
- The device is designed to transfer substrates efficiently and securely.
- The carrier lifter allows for vertical movement of the carrier, enabling easy access to the substrate.
- The vertical stabilization unit reduces vertical vibration of the carrier, ensuring stability during transfer.
- The rotation stabilization unit reduces rotation of the carrier, preventing any unwanted movement.
- The carrier holder securely holds the carrier in place during transfer.
- The buffer in the vertical stabilization unit contracts or relaxes to minimize vertical vibration.
Potential Applications:
- Semiconductor manufacturing: The device can be used to transfer delicate semiconductor wafers during the manufacturing process.
- Display panel production: It can be utilized for transferring fragile display panels, such as LCD or OLED screens, without causing damage.
- Optics industry: The device can be applied in the production of precision optical components, ensuring stable and accurate transfer.
Problems Solved:
- Vertical vibration: The device reduces vertical vibration, which can be detrimental to delicate substrates, preventing potential damage.
- Rotation: The rotation stabilization unit eliminates unwanted rotation of the carrier, ensuring precise and controlled transfer.
Benefits:
- Improved substrate transfer: The device provides stability and reduces vibration and rotation, resulting in more reliable and accurate substrate transfer.
- Enhanced product quality: By minimizing vibration and rotation, the device helps prevent damage to delicate substrates, leading to higher-quality end products.
- Increased efficiency: The efficient design of the device allows for smooth and secure transfer, reducing the risk of errors or delays in the manufacturing process.
Original Abstract Submitted
A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.
