18373364. SEMICONDUCTOR MANUFACTURING APPARATUS simplified abstract (Samsung Electronics Co., Ltd.)
Contents
SEMICONDUCTOR MANUFACTURING APPARATUS
Organization Name
Inventor(s)
Jae Hyun Yang of Suwon-si (KR)
Sang Yub Ie of Hwaseong-si (KR)
SEMICONDUCTOR MANUFACTURING APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 18373364 titled 'SEMICONDUCTOR MANUFACTURING APPARATUS
Simplified Explanation
The abstract describes a semiconductor manufacturing apparatus that includes a process chamber and a boat with a support member for substrates. The boat is enclosed by an inner tube with a slit along one side. A nozzle supplies a process gas and has a gas injection port positioned at the slit. The gas injection port has a first inlet and outlet, while the slit has a second inlet and outlet. The distances between the inlets/outlets and a center line connecting the centers of the first inlet and second outlet are different.
- The semiconductor manufacturing apparatus includes a process chamber and a boat with a support member for substrates.
- An inner tube encloses the boat and has a slit along one side.
- A nozzle supplies a process gas and has a gas injection port positioned at the slit.
- The gas injection port has a first inlet and outlet.
- The slit has a second inlet and outlet.
- The distances between the inlets/outlets and a center line connecting the centers of the first inlet and second outlet are different.
Potential Applications:
- Semiconductor manufacturing processes
- Thin film deposition
- Etching processes
Problems Solved:
- Improved distribution of process gas within the process chamber
- Enhanced control of gas flow and uniformity of deposition/etching processes
Benefits:
- Improved process efficiency and yield
- Enhanced quality and uniformity of semiconductor devices
- Reduced manufacturing costs
Original Abstract Submitted
A semiconductor manufacturing apparatus including a process chamber and a boat having a support member supporting substrates arranged in a first direction. An inner tube encloses the boat and includes a slit along a side wall. A nozzle supplies a process gas and includes a gas injection port at a position corresponding to the slit. The gas injection port includes a first inlet and first outlet. The slit includes a second inlet and second outlet. A distance to an end of the first inlet from a center line that connects a center of the first inlet and a center of the second outlet is different from the distance from the center line to an end of the first outlet and/or a distance from the center line to an end of the second inlet is different from a distance from the center line to an end of the second outlet.
