Taiwan semiconductor manufacturing company, ltd. (20250006777). THIN FILM RESISTOR

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THIN FILM RESISTOR

Organization Name

taiwan semiconductor manufacturing company, ltd.

Inventor(s)

Chun-Heng Chen of Hsinchu City (TW)

Chi-Yuan Shih of Hsinchu (TW)

Hsin-Li Cheng of Hsinchu (TW)

Shih-Fen Huang of Zhubei (TW)

Tuo-Hsin Chien of Hsinchu County (TW)

Yu-Chi Chang of Kaohsiung (TW)

THIN FILM RESISTOR

This abstract first appeared for US patent application 20250006777 titled 'THIN FILM RESISTOR



Original Abstract Submitted

resistors and method of forming the same are provided. a device structure according to the present disclosure includes a substrate, a first intermetal dielectric (imd) layer over the substrate, a resistor that includes a first resistor layer over the first imd layer, a second resistor layer over the first resistor layer, and a third resistor layer over the second resistor layer, a second imd layer over the first imd layer and the resistor, a first contact via extending through the second imd layer and the third resistor layer and terminating in the first resistor layer, and a second contact via extending through the second imd layer and the third resistor layer and terminating in the first resistor layer.

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