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Bibliographic details for US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract

Citation styles for US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract

APA style

US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract. (2023, November 30). WikiPatents, . Retrieved 08:18, June 2, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915.

MLA style

"US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract." WikiPatents, . 30 Nov 2023, 15:19 UTC. 2 Jun 2024, 08:18 <http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915>.

MHRA style

WikiPatents contributors, 'US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract', WikiPatents, , 30 November 2023, 15:19 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915> [accessed 2 June 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915 (accessed June 2, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract [Internet]. WikiPatents, ; 2023 Nov 30, 15:19 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915.

Bluebook style

US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915 (last visited June 2, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915",
   note = "[Online; accessed 2-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18231165. DEVICE FOR ADJUSTING POSITION OF CHAMBER AND PLASMA PROCESS CHAMBER INCLUDING THE SAME FOR SEMICONDUCTOR MANUFACTURING simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18231165._DEVICE_FOR_ADJUSTING_POSITION_OF_CHAMBER_AND_PLASMA_PROCESS_CHAMBER_INCLUDING_THE_SAME_FOR_SEMICONDUCTOR_MANUFACTURING_simplified_abstract&oldid=8915}",
   note = "[Online; accessed 2-June-2024]"
 }


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