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Bibliographic details for US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract
- Page name: US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 10 November 2023 06:47 UTC
- Date retrieved: 9 June 2024 10:33 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165
- Page Version ID: 7165
Citation styles for US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract
APA style
US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract. (2023, November 10). WikiPatents, . Retrieved 10:33, June 9, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165.
MLA style
"US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract." WikiPatents, . 10 Nov 2023, 06:47 UTC. 9 Jun 2024, 10:33 <http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165>.
MHRA style
WikiPatents contributors, 'US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract', WikiPatents, , 10 November 2023, 06:47 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165> [accessed 9 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165 (accessed June 9, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract [Internet]. WikiPatents, ; 2023 Nov 10, 06:47 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165.
Bluebook style
US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165 (last visited June 9, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165",
note = "[Online; accessed 9-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 17811109. Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_17811109._Self-Aligned_Acoustic_Hole_Formation_in_Piezoelectrical_MEMS_Microphone_simplified_abstract&oldid=7165}",
note = "[Online; accessed 9-June-2024]"
}
