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Bibliographic details for US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract
- Page name: US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 9 November 2023 11:10 UTC
- Date retrieved: 9 June 2024 23:46 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722
- Page Version ID: 6722
Citation styles for US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract
APA style
US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract. (2023, November 9). WikiPatents, . Retrieved 23:46, June 9, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722.
MLA style
"US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract." WikiPatents, . 9 Nov 2023, 11:10 UTC. 9 Jun 2024, 23:46 <http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722>.
MHRA style
WikiPatents contributors, 'US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract', WikiPatents, , 9 November 2023, 11:10 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722> [accessed 9 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722 (accessed June 9, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract [Internet]. WikiPatents, ; 2023 Nov 9, 11:10 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722.
Bluebook style
US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722 (last visited June 9, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722",
note = "[Online; accessed 9-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 17661838. SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_17661838._SEMICONDUCTOR_PROCESSING_TOOL_AND_METHODS_OF_OPERATION_simplified_abstract&oldid=6722}",
note = "[Online; accessed 9-June-2024]"
}
