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Bibliographic details for US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract
- Page name: US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 9 November 2023 11:10 UTC
- Date retrieved: 9 June 2024 11:15 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721
- Page Version ID: 6721
Citation styles for US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract
APA style
US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract. (2023, November 9). WikiPatents, . Retrieved 11:15, June 9, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721.
MLA style
"US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract." WikiPatents, . 9 Nov 2023, 11:10 UTC. 9 Jun 2024, 11:15 <http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721>.
MHRA style
WikiPatents contributors, 'US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract', WikiPatents, , 9 November 2023, 11:10 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721> [accessed 9 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721 (accessed June 9, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract [Internet]. WikiPatents, ; 2023 Nov 9, 11:10 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721.
Bluebook style
US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721 (last visited June 9, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721",
note = "[Online; accessed 9-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18351566. WAFER CLEANING METHOD simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18351566._WAFER_CLEANING_METHOD_simplified_abstract&oldid=6721}",
note = "[Online; accessed 9-June-2024]"
}
