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Bibliographic details for 18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

Citation styles for 18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, May 8). WikiPatents, . Retrieved 18:54, June 2, 2024 from http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979.

MLA style

"18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 8 May 2024, 06:19 UTC. 2 Jun 2024, 18:54 <http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979>.

MHRA style

WikiPatents contributors, '18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 8 May 2024, 06:19 UTC, <http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979> [accessed 2 June 2024]

Chicago style

WikiPatents contributors, "18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979 (accessed June 2, 2024).

CBE/CSE style

WikiPatents contributors. 18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 May 8, 06:19 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979.

Bluebook style

18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979 (last visited June 2, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979",
   note = "[Online; accessed 2-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18402563. METHOD OF BREAKING THROUGH ETCH STOP LAYER simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18402563._METHOD_OF_BREAKING_THROUGH_ETCH_STOP_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58979}",
   note = "[Online; accessed 2-June-2024]"
 }


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