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Bibliographic details for 18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

Citation styles for 18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, May 2). WikiPatents, . Retrieved 08:11, June 1, 2024 from http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953.

MLA style

"18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 2 May 2024, 10:31 UTC. 1 Jun 2024, 08:11 <http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953>.

MHRA style

WikiPatents contributors, '18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 2 May 2024, 10:31 UTC, <http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953> [accessed 1 June 2024]

Chicago style

WikiPatents contributors, "18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953 (accessed June 1, 2024).

CBE/CSE style

WikiPatents contributors. 18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 May 2, 10:31 UTC [cited 2024 Jun 1]. Available from: http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953.

Bluebook style

18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953 (last visited June 1, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953",
   note = "[Online; accessed 1-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18402511. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18402511._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=58953}",
   note = "[Online; accessed 1-June-2024]"
 }


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