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Bibliographic details for 18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA)

Citation styles for 18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA)

APA style

18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA). (2024, April 26). WikiPatents, . Retrieved 09:06, June 1, 2024 from http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872.

MLA style

"18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA)." WikiPatents, . 26 Apr 2024, 09:18 UTC. 1 Jun 2024, 09:06 <http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872>.

MHRA style

WikiPatents contributors, '18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA)', WikiPatents, , 26 April 2024, 09:18 UTC, <http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872> [accessed 1 June 2024]

Chicago style

WikiPatents contributors, "18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA)," WikiPatents, , http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872 (accessed June 1, 2024).

CBE/CSE style

WikiPatents contributors. 18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA) [Internet]. WikiPatents, ; 2024 Apr 26, 09:18 UTC [cited 2024 Jun 1]. Available from: http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872.

Bluebook style

18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA), http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872 (last visited June 1, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872",
   note = "[Online; accessed 1-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18049128. PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ARTICLE simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18049128._PLANARIZATION_PROCESS,_APPARATUS_AND_METHOD_OF_MANUFACTURING_AN_ARTICLE_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=58872}",
   note = "[Online; accessed 1-June-2024]"
 }


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