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Bibliographic details for 18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, April 26). WikiPatents, . Retrieved 10:22, June 2, 2024 from http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485.

MLA style

"18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 26 Apr 2024, 05:16 UTC. 2 Jun 2024, 10:22 <http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485>.

MHRA style

WikiPatents contributors, '18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 26 April 2024, 05:16 UTC, <http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485> [accessed 2 June 2024]

Chicago style

WikiPatents contributors, "18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485 (accessed June 2, 2024).

CBE/CSE style

WikiPatents contributors. 18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Apr 26, 05:16 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485.

Bluebook style

18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485 (last visited June 2, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485",
   note = "[Online; accessed 2-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18198624._POWER_GENERATOR_WITH_PARTIAL_SINUSOIDAL_WAVEFORM,_PLASMA_PROCESSING_APPARATUS_INCLUDING_THE_SAME_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=57485}",
   note = "[Online; accessed 2-June-2024]"
 }


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