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Bibliographic details for 18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.)
- Page name: 18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 04:27 UTC
- Date retrieved: 1 June 2024 04:13 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612
- Page Version ID: 54612
Citation styles for 18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.)
APA style
18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.). (2024, April 16). WikiPatents, . Retrieved 04:13, June 1, 2024 from http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612.
MLA style
"18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.)." WikiPatents, . 16 Apr 2024, 04:27 UTC. 1 Jun 2024, 04:13 <http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612>.
MHRA style
WikiPatents contributors, '18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.)', WikiPatents, , 16 April 2024, 04:27 UTC, <http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612> [accessed 1 June 2024]
Chicago style
WikiPatents contributors, "18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.)," WikiPatents, , http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612 (accessed June 1, 2024).
CBE/CSE style
WikiPatents contributors. 18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.) [Internet]. WikiPatents, ; 2024 Apr 16, 04:27 UTC [cited 2024 Jun 1]. Available from: http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612.
Bluebook style
18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.), http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612 (last visited June 1, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612", note = "[Online; accessed 1-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "18375202. BRUSHES, SYSTEMS, AND METHODS FOR POST-CMP CLEANING OF A SURFACE simplified abstract (ILLINOIS TOOL WORKS INC.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=18375202._BRUSHES,_SYSTEMS,_AND_METHODS_FOR_POST-CMP_CLEANING_OF_A_SURFACE_simplified_abstract_(ILLINOIS_TOOL_WORKS_INC.)&oldid=54612}", note = "[Online; accessed 1-June-2024]" }