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Bibliographic details for 18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Page name: 18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 03:43 UTC
- Date retrieved: 2 June 2024 06:38 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851
- Page Version ID: 53851
Citation styles for 18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
APA style
18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, April 16). WikiPatents, . Retrieved 06:38, June 2, 2024 from http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851.
MLA style
"18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 16 Apr 2024, 03:43 UTC. 2 Jun 2024, 06:38 <http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851>.
MHRA style
WikiPatents contributors, '18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 16 April 2024, 03:43 UTC, <http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851> [accessed 2 June 2024]
Chicago style
WikiPatents contributors, "18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851 (accessed June 2, 2024).
CBE/CSE style
WikiPatents contributors. 18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Apr 16, 03:43 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851.
Bluebook style
18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851 (last visited June 2, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851",
note = "[Online; accessed 2-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18389827. PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18389827._PLASMA_PROCESSING_METHOD_AND_PLASMA_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=53851}",
note = "[Online; accessed 2-June-2024]"
}
