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Bibliographic details for 17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation)
- Page name: 17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 12 April 2024 07:32 UTC
- Date retrieved: 29 May 2024 11:01 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895
- Page Version ID: 49895
Citation styles for 17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation)
APA style
17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation). (2024, April 12). WikiPatents, . Retrieved 11:01, May 29, 2024 from http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895.
MLA style
"17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation)." WikiPatents, . 12 Apr 2024, 07:32 UTC. 29 May 2024, 11:01 <http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895>.
MHRA style
WikiPatents contributors, '17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation)', WikiPatents, , 12 April 2024, 07:32 UTC, <http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895> [accessed 29 May 2024]
Chicago style
WikiPatents contributors, "17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895 (accessed May 29, 2024).
CBE/CSE style
WikiPatents contributors. 17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Apr 12, 07:32 UTC [cited 2024 May 29]. Available from: http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895.
Bluebook style
17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895 (last visited May 29, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895",
note = "[Online; accessed 29-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17957106. ETCH STOP LAYER FOR METAL GATE CUT simplified abstract (Intel Corporation) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17957106._ETCH_STOP_LAYER_FOR_METAL_GATE_CUT_simplified_abstract_(Intel_Corporation)&oldid=49895}",
note = "[Online; accessed 29-May-2024]"
}
