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Bibliographic details for 17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation)

Citation styles for 17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation)

APA style

17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation). (2024, April 12). WikiPatents, . Retrieved 14:52, June 10, 2024 from http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870.

MLA style

"17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation)." WikiPatents, . 12 Apr 2024, 07:30 UTC. 10 Jun 2024, 14:52 <http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870>.

MHRA style

WikiPatents contributors, '17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation)', WikiPatents, , 12 April 2024, 07:30 UTC, <http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870> [accessed 10 June 2024]

Chicago style

WikiPatents contributors, "17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870 (accessed June 10, 2024).

CBE/CSE style

WikiPatents contributors. 17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Apr 12, 07:30 UTC [cited 2024 Jun 10]. Available from: http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870.

Bluebook style

17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870 (last visited June 10, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870",
   note = "[Online; accessed 10-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17957552. BACKSIDE WAFER TREATMENTS TO REDUCE DISTORTIONS AND OVERLAY ERRORS DURING WAFER CHUCKING simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17957552._BACKSIDE_WAFER_TREATMENTS_TO_REDUCE_DISTORTIONS_AND_OVERLAY_ERRORS_DURING_WAFER_CHUCKING_simplified_abstract_(Intel_Corporation)&oldid=49870}",
   note = "[Online; accessed 10-June-2024]"
 }


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