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Bibliographic details for Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract
- Page name: Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 11 April 2024 04:47 UTC
- Date retrieved: 2 June 2024 06:35 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353
- Page Version ID: 48353
Citation styles for Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract
APA style
Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract. (2024, April 11). WikiPatents, . Retrieved 06:35, June 2, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353.
MLA style
"Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract." WikiPatents, . 11 Apr 2024, 04:47 UTC. 2 Jun 2024, 06:35 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353>.
MHRA style
WikiPatents contributors, 'Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract', WikiPatents, , 11 April 2024, 04:47 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353> [accessed 2 June 2024]
Chicago style
WikiPatents contributors, "Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353 (accessed June 2, 2024).
CBE/CSE style
WikiPatents contributors. Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract [Internet]. WikiPatents, ; 2024 Apr 11, 04:47 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353.
Bluebook style
Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353 (last visited June 2, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353",
note = "[Online; accessed 2-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Taiwan semiconductor manufacturing company, ltd. (20240105460). Hard Mask Removal Method simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_company,_ltd._(20240105460)._Hard_Mask_Removal_Method_simplified_abstract&oldid=48353}",
note = "[Online; accessed 2-June-2024]"
}
