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Bibliographic details for 18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED)

Citation styles for 18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED)

APA style

18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 20:32, June 9, 2024 from http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943.

MLA style

"18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:18 UTC. 9 Jun 2024, 20:32 <http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943>.

MHRA style

WikiPatents contributors, '18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:18 UTC, <http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943> [accessed 9 June 2024]

Chicago style

WikiPatents contributors, "18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943 (accessed June 9, 2024).

CBE/CSE style

WikiPatents contributors. 18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:18 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943.

Bluebook style

18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943 (last visited June 9, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943",
   note = "[Online; accessed 9-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18469673. ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18469673._ETCHING_CONTROL_DEVICE,_ETCHING_CONTROL_METHOD,_AND_ETCHING_CONTROL_SYSTEM_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43943}",
   note = "[Online; accessed 9-June-2024]"
 }


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