Cite This Page
Bibliographic details for 17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:16 UTC
- Date retrieved: 2 June 2024 07:01 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935
- Page Version ID: 43935
Citation styles for 17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED)
APA style
17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 07:01, June 2, 2024 from http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935.
MLA style
"17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:16 UTC. 2 Jun 2024, 07:01 <http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935>.
MHRA style
WikiPatents contributors, '17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:16 UTC, <http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935> [accessed 2 June 2024]
Chicago style
WikiPatents contributors, "17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935 (accessed June 2, 2024).
CBE/CSE style
WikiPatents contributors. 17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:16 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935.
Bluebook style
17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935 (last visited June 2, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935",
note = "[Online; accessed 2-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17950001. Method and Apparatus for In-Situ Dry Development simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17950001._Method_and_Apparatus_for_In-Situ_Dry_Development_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43935}",
note = "[Online; accessed 2-June-2024]"
}
