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Bibliographic details for 18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation)
- Page name: 18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 22 March 2024 09:01 UTC
- Date retrieved: 2 June 2024 04:48 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021
- Page Version ID: 42021
Citation styles for 18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation)
APA style
18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation). (2024, March 22). WikiPatents, . Retrieved 04:48, June 2, 2024 from http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021.
MLA style
"18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation)." WikiPatents, . 22 Mar 2024, 09:01 UTC. 2 Jun 2024, 04:48 <http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021>.
MHRA style
WikiPatents contributors, '18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation)', WikiPatents, , 22 March 2024, 09:01 UTC, <http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021> [accessed 2 June 2024]
Chicago style
WikiPatents contributors, "18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021 (accessed June 2, 2024).
CBE/CSE style
WikiPatents contributors. 18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation) [Internet]. WikiPatents, ; 2024 Mar 22, 09:01 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021.
Bluebook style
18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation), http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021 (last visited June 2, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021",
note = "[Online; accessed 2-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18456652. SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract (Kioxia Corporation) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18456652._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract_(Kioxia_Corporation)&oldid=42021}",
note = "[Online; accessed 2-June-2024]"
}
