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Bibliographic details for US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract
- Page name: US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 26 October 2023 05:53 UTC
- Date retrieved: 11 June 2024 03:57 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199
- Page Version ID: 4199
Citation styles for US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract
APA style
US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract. (2023, October 26). WikiPatents, . Retrieved 03:57, June 11, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199.
MLA style
"US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract." WikiPatents, . 26 Oct 2023, 05:53 UTC. 11 Jun 2024, 03:57 <http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199>.
MHRA style
WikiPatents contributors, 'US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract', WikiPatents, , 26 October 2023, 05:53 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199> [accessed 11 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199 (accessed June 11, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract [Internet]. WikiPatents, ; 2023 Oct 26, 05:53 UTC [cited 2024 Jun 11]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199.
Bluebook style
US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199 (last visited June 11, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199",
note = "[Online; accessed 11-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 17723372. MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_17723372._MULTI-CHAMBER_SEMICONDUCTOR_PROCESSING_SYSTEM_WITH_TRANSFER_ROBOT_TEMPERATURE_ADJUSTMENT_simplified_abstract&oldid=4199}",
note = "[Online; accessed 11-June-2024]"
}
