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Bibliographic details for 18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

Citation styles for 18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

APA style

18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, March 22). WikiPatents, . Retrieved 18:28, June 8, 2024 from http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840.

MLA style

"18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 22 Mar 2024, 08:31 UTC. 8 Jun 2024, 18:28 <http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840>.

MHRA style

WikiPatents contributors, '18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 22 March 2024, 08:31 UTC, <http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840> [accessed 8 June 2024]

Chicago style

WikiPatents contributors, "18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840 (accessed June 8, 2024).

CBE/CSE style

WikiPatents contributors. 18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 Mar 22, 08:31 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840.

Bluebook style

18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840 (last visited June 8, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840",
   note = "[Online; accessed 8-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18153597. AREA-SELECTIVE REMOVAL AND SELECTIVE METAL CAP simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18153597._AREA-SELECTIVE_REMOVAL_AND_SELECTIVE_METAL_CAP_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=41840}",
   note = "[Online; accessed 8-June-2024]"
 }


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