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Bibliographic details for 18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, March 22). WikiPatents, . Retrieved 03:45, June 10, 2024 from http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269.

MLA style

"18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 22 Mar 2024, 06:29 UTC. 10 Jun 2024, 03:45 <http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269>.

MHRA style

WikiPatents contributors, '18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 22 March 2024, 06:29 UTC, <http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269> [accessed 10 June 2024]

Chicago style

WikiPatents contributors, "18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269 (accessed June 10, 2024).

CBE/CSE style

WikiPatents contributors. 18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Mar 22, 06:29 UTC [cited 2024 Jun 10]. Available from: http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269.

Bluebook style

18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269 (last visited June 10, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269",
   note = "[Online; accessed 10-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18208046. PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18208046._PLASMA_SHUTTER_AND_SUBSTRATE_PROCESSING_APPARATUS_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=41269}",
   note = "[Online; accessed 10-June-2024]"
 }


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