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Bibliographic details for Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract
- Page name: Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 21 March 2024 10:39 UTC
- Date retrieved: 10 June 2024 00:58 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555
- Page Version ID: 40555
Citation styles for Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract
APA style
Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract. (2024, March 21). WikiPatents, . Retrieved 00:58, June 10, 2024 from http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555.
MLA style
"Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract." WikiPatents, . 21 Mar 2024, 10:39 UTC. 10 Jun 2024, 00:58 <http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555>.
MHRA style
WikiPatents contributors, 'Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract', WikiPatents, , 21 March 2024, 10:39 UTC, <http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555> [accessed 10 June 2024]
Chicago style
WikiPatents contributors, "Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555 (accessed June 10, 2024).
CBE/CSE style
WikiPatents contributors. Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract [Internet]. WikiPatents, ; 2024 Mar 21, 10:39 UTC [cited 2024 Jun 10]. Available from: http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555.
Bluebook style
Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract, http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555 (last visited June 10, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555", note = "[Online; accessed 10-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "Kioxia corporation (20240096669). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096669)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_FOR_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40555}", note = "[Online; accessed 10-June-2024]" }