Cite This Page

Jump to navigation Jump to search

Bibliographic details for Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract

Citation styles for Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract

APA style

Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract. (2024, March 21). WikiPatents, . Retrieved 18:23, June 8, 2024 from http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554.

MLA style

"Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract." WikiPatents, . 21 Mar 2024, 10:39 UTC. 8 Jun 2024, 18:23 <http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554>.

MHRA style

WikiPatents contributors, 'Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract', WikiPatents, , 21 March 2024, 10:39 UTC, <http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554> [accessed 8 June 2024]

Chicago style

WikiPatents contributors, "Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554 (accessed June 8, 2024).

CBE/CSE style

WikiPatents contributors. Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract [Internet]. WikiPatents, ; 2024 Mar 21, 10:39 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554.

Bluebook style

Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract, http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554 (last visited June 8, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554",
   note = "[Online; accessed 8-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Kioxia corporation (20240096659). SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096659)._SUBSTRATE_PROCESSING_APPARATUS,_SUBSTRATE_PROCESSING_METHOD,_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_simplified_abstract&oldid=40554}",
   note = "[Online; accessed 8-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"