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Bibliographic details for Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract
- Page name: Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 21 March 2024 10:38 UTC
- Date retrieved: 9 June 2024 19:33 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548
- Page Version ID: 40548
Citation styles for Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract
APA style
Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract. (2024, March 21). WikiPatents, . Retrieved 19:33, June 9, 2024 from http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548.
MLA style
"Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract." WikiPatents, . 21 Mar 2024, 10:38 UTC. 9 Jun 2024, 19:33 <http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548>.
MHRA style
WikiPatents contributors, 'Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract', WikiPatents, , 21 March 2024, 10:38 UTC, <http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548> [accessed 9 June 2024]
Chicago style
WikiPatents contributors, "Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548 (accessed June 9, 2024).
CBE/CSE style
WikiPatents contributors. Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract [Internet]. WikiPatents, ; 2024 Mar 21, 10:38 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548.
Bluebook style
Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract, http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548 (last visited June 9, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548",
note = "[Online; accessed 9-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Kioxia corporation (20240096593). PLASMA PROCESSING DEVICE, PLASMA PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Kioxia_corporation_(20240096593)._PLASMA_PROCESSING_DEVICE,_PLASMA_PROCESSING_METHOD,_AND_SEMICONDUCTOR_DEVICE_MANUFACTURING_METHOD_simplified_abstract&oldid=40548}",
note = "[Online; accessed 9-June-2024]"
}
