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Bibliographic details for Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract

Citation styles for Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract

APA style

Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract. (2024, March 21). WikiPatents, . Retrieved 18:56, June 8, 2024 from http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294.

MLA style

"Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract." WikiPatents, . 21 Mar 2024, 10:04 UTC. 8 Jun 2024, 18:56 <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294>.

MHRA style

WikiPatents contributors, 'Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract', WikiPatents, , 21 March 2024, 10:04 UTC, <http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294> [accessed 8 June 2024]

Chicago style

WikiPatents contributors, "Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294 (accessed June 8, 2024).

CBE/CSE style

WikiPatents contributors. Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract [Internet]. WikiPatents, ; 2024 Mar 21, 10:04 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294.

Bluebook style

Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract, http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294 (last visited June 8, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294",
   note = "[Online; accessed 8-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Taiwan semiconductor manufacturing co., ltd. (20240094629). PELLICLE FOR AN EUV LITHOGRAPHY MASK AND A METHOD OF MANUFACTURING THEREOF simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Taiwan_semiconductor_manufacturing_co.,_ltd._(20240094629)._PELLICLE_FOR_AN_EUV_LITHOGRAPHY_MASK_AND_A_METHOD_OF_MANUFACTURING_THEREOF_simplified_abstract&oldid=40294}",
   note = "[Online; accessed 8-June-2024]"
 }


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