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Bibliographic details for Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract
- Page name: Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 21 March 2024 09:15 UTC
- Date retrieved: 9 June 2024 22:46 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951
- Page Version ID: 39951
Citation styles for Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract
APA style
Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract. (2024, March 21). WikiPatents, . Retrieved 22:46, June 9, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951.
MLA style
"Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract." WikiPatents, . 21 Mar 2024, 09:15 UTC. 9 Jun 2024, 22:46 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951>.
MHRA style
WikiPatents contributors, 'Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract', WikiPatents, , 21 March 2024, 09:15 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951> [accessed 9 June 2024]
Chicago style
WikiPatents contributors, "Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951 (accessed June 9, 2024).
CBE/CSE style
WikiPatents contributors. Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract [Internet]. WikiPatents, ; 2024 Mar 21, 09:15 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951.
Bluebook style
Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951 (last visited June 9, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951",
note = "[Online; accessed 9-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Samsung electronics co., ltd. (20240091902). RETAINER RING, CHEMICAL MECHANICAL POLISHING APPARATUS, AND SUBSTRATE POLISHING METHOD simplified abstract --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240091902)._RETAINER_RING,_CHEMICAL_MECHANICAL_POLISHING_APPARATUS,_AND_SUBSTRATE_POLISHING_METHOD_simplified_abstract&oldid=39951}",
note = "[Online; accessed 9-June-2024]"
}
