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Bibliographic details for 17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)

Citation styles for 17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)

APA style

17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION). (2024, March 17). WikiPatents, . Retrieved 23:05, June 1, 2024 from http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805.

MLA style

"17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)." WikiPatents, . 17 Mar 2024, 05:32 UTC. 1 Jun 2024, 23:05 <http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805>.

MHRA style

WikiPatents contributors, '17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)', WikiPatents, , 17 March 2024, 05:32 UTC, <http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805> [accessed 1 June 2024]

Chicago style

WikiPatents contributors, "17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)," WikiPatents, , http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805 (accessed June 1, 2024).

CBE/CSE style

WikiPatents contributors. 17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) [Internet]. WikiPatents, ; 2024 Mar 17, 05:32 UTC [cited 2024 Jun 1]. Available from: http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805.

Bluebook style

17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION), http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805 (last visited June 1, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805",
   note = "[Online; accessed 1-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17942262. SUB-EUV PATTERNING HEATERS FOR BAR MUSHROOM CELL PCM simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17942262._SUB-EUV_PATTERNING_HEATERS_FOR_BAR_MUSHROOM_CELL_PCM_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=37805}",
   note = "[Online; accessed 1-June-2024]"
 }


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