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Citation styles for 17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation)

APA style

17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation). (2024, February 21). WikiPatents, . Retrieved 00:34, June 1, 2024 from http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813.

MLA style

"17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation)." WikiPatents, . 21 Feb 2024, 08:15 UTC. 1 Jun 2024, 00:34 <http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813>.

MHRA style

WikiPatents contributors, '17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation)', WikiPatents, , 21 February 2024, 08:15 UTC, <http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813> [accessed 1 June 2024]

Chicago style

WikiPatents contributors, "17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813 (accessed June 1, 2024).

CBE/CSE style

WikiPatents contributors. 17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation) [Internet]. WikiPatents, ; 2024 Feb 21, 08:15 UTC [cited 2024 Jun 1]. Available from: http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813.

Bluebook style

17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation), http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813 (last visited June 1, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813",
   note = "[Online; accessed 1-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17883678. Real-Time Detection of Deflections and Ruptures of EUV Pellicle Membranes simplified abstract (Intel Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17883678._Real-Time_Detection_of_Deflections_and_Ruptures_of_EUV_Pellicle_Membranes_simplified_abstract_(Intel_Corporation)&oldid=35813}",
   note = "[Online; accessed 1-June-2024]"
 }