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Bibliographic details for US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract

Citation styles for US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract

APA style

US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract. (2023, October 19). WikiPatents, . Retrieved 06:00, June 9, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446.

MLA style

"US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract." WikiPatents, . 19 Oct 2023, 10:30 UTC. 9 Jun 2024, 06:00 <http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446>.

MHRA style

WikiPatents contributors, 'US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract', WikiPatents, , 19 October 2023, 10:30 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446> [accessed 9 June 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446 (accessed June 9, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract [Internet]. WikiPatents, ; 2023 Oct 19, 10:30 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446.

Bluebook style

US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446 (last visited June 9, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446",
   note = "[Online; accessed 9-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18334640. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18334640._EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF_simplified_abstract&oldid=3446}",
   note = "[Online; accessed 9-June-2024]"
 }


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