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Bibliographic details for US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract
- Page name: US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 19 October 2023 02:28 UTC
- Date retrieved: 29 May 2024 01:03 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393
- Page Version ID: 3393
Citation styles for US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract
APA style
US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract. (2023, October 19). WikiPatents, . Retrieved 01:03, May 29, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393.
MLA style
"US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract." WikiPatents, . 19 Oct 2023, 02:28 UTC. 29 May 2024, 01:03 <http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393>.
MHRA style
WikiPatents contributors, 'US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract', WikiPatents, , 19 October 2023, 02:28 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393> [accessed 29 May 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393 (accessed May 29, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract [Internet]. WikiPatents, ; 2023 Oct 19, 02:28 UTC [cited 2024 May 29]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393.
Bluebook style
US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393 (last visited May 29, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393",
note = "[Online; accessed 29-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18334526. Chemical Mechanical Planarization Tool simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18334526._Chemical_Mechanical_Planarization_Tool_simplified_abstract&oldid=3393}",
note = "[Online; accessed 29-May-2024]"
}
