Cite This Page

Jump to navigation Jump to search

Bibliographic details for 20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)

Citation styles for 20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)

APA style

20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited). (2024, February 9). WikiPatents, . Retrieved 17:34, June 7, 2024 from http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816.

MLA style

"20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)." WikiPatents, . 9 Feb 2024, 03:44 UTC. 7 Jun 2024, 17:34 <http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816>.

MHRA style

WikiPatents contributors, '20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)', WikiPatents, , 9 February 2024, 03:44 UTC, <http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816> [accessed 7 June 2024]

Chicago style

WikiPatents contributors, "20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816 (accessed June 7, 2024).

CBE/CSE style

WikiPatents contributors. 20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Feb 9, 03:44 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816.

Bluebook style

20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816 (last visited June 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816",
   note = "[Online; accessed 7-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240047223. SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240047223._SUBSTRATE_PROCESSING_METHOD_AND_SUBSTRATE_PROCESSING_APPARATUS_simplified_abstract_(Tokyo_Electron_Limited)&oldid=32816}",
   note = "[Online; accessed 7-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"