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Bibliographic details for 20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.)
- Page name: 20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 1 February 2024 09:38 UTC
- Date retrieved: 2 June 2024 18:25 UTC
- Permanent URL: http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552
- Page Version ID: 30552
Citation styles for 20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.)
APA style
20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.). (2024, February 1). WikiPatents, . Retrieved 18:25, June 2, 2024 from http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552.
MLA style
"20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.)." WikiPatents, . 1 Feb 2024, 09:38 UTC. 2 Jun 2024, 18:25 <http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552>.
MHRA style
WikiPatents contributors, '20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.)', WikiPatents, , 1 February 2024, 09:38 UTC, <http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552> [accessed 2 June 2024]
Chicago style
WikiPatents contributors, "20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552 (accessed June 2, 2024).
CBE/CSE style
WikiPatents contributors. 20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Feb 1, 09:38 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552.
Bluebook style
20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552 (last visited June 2, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552",
note = "[Online; accessed 2-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "20240033878. MINIMIZING SUBSTRATE BOW DURING POLISHING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=20240033878._MINIMIZING_SUBSTRATE_BOW_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=30552}",
note = "[Online; accessed 2-June-2024]"
}
