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Bibliographic details for 20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)

Citation styles for 20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)

APA style

20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited). (2024, February 1). WikiPatents, . Retrieved 03:08, June 7, 2024 from http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540.

MLA style

"20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 1 Feb 2024, 09:37 UTC. 7 Jun 2024, 03:08 <http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540>.

MHRA style

WikiPatents contributors, '20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 1 February 2024, 09:37 UTC, <http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540> [accessed 7 June 2024]

Chicago style

WikiPatents contributors, "20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540 (accessed June 7, 2024).

CBE/CSE style

WikiPatents contributors. 20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Feb 1, 09:37 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540.

Bluebook style

20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540 (last visited June 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540",
   note = "[Online; accessed 7-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240033766. SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240033766._SUBSTRATE_PROCESSING_APPARATUS_AND_SUBSTRATE_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=30540}",
   note = "[Online; accessed 7-June-2024]"
 }


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