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Bibliographic details for 20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation)

Citation styles for 20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation)

APA style

20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation). (2024, January 30). WikiPatents, . Retrieved 17:15, June 7, 2024 from http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754.

MLA style

"20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation)." WikiPatents, . 30 Jan 2024, 09:18 UTC. 7 Jun 2024, 17:15 <http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754>.

MHRA style

WikiPatents contributors, '20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation)', WikiPatents, , 30 January 2024, 09:18 UTC, <http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754> [accessed 7 June 2024]

Chicago style

WikiPatents contributors, "20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754 (accessed June 7, 2024).

CBE/CSE style

WikiPatents contributors. 20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation) [Internet]. WikiPatents, ; 2024 Jan 30, 09:18 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754.

Bluebook style

20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation), http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754 (last visited June 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754",
   note = "[Online; accessed 7-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240027919. MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS simplified abstract (KLA Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240027919._MASSIVE_OVERLAY_METROLOGY_SAMPLING_WITH_MULTIPLE_MEASUREMENT_COLUMNS_simplified_abstract_(KLA_Corporation)&oldid=29754}",
   note = "[Online; accessed 7-June-2024]"
 }


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