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Bibliographic details for US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract

Citation styles for US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract

APA style

US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract. (2023, October 18). WikiPatents, . Retrieved 06:29, May 29, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922.

MLA style

"US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract." WikiPatents, . 18 Oct 2023, 10:38 UTC. 29 May 2024, 06:29 <http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922>.

MHRA style

WikiPatents contributors, 'US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract', WikiPatents, , 18 October 2023, 10:38 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922> [accessed 29 May 2024]

Chicago style

WikiPatents contributors, "US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922 (accessed May 29, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract [Internet]. WikiPatents, ; 2023 Oct 18, 10:38 UTC [cited 2024 May 29]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922.

Bluebook style

US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922 (last visited May 29, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922",
   note = "[Online; accessed 29-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 17717709. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_17717709._EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION_simplified_abstract&oldid=2922}",
   note = "[Online; accessed 29-May-2024]"
 }


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