Cite This Page

Jump to navigation Jump to search

Bibliographic details for 20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)

Citation styles for 20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)

APA style

20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.). (2024, January 19). WikiPatents, . Retrieved 19:14, May 23, 2024 from http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676.

MLA style

"20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)." WikiPatents, . 19 Jan 2024, 10:28 UTC. 23 May 2024, 19:14 <http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676>.

MHRA style

WikiPatents contributors, '20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)', WikiPatents, , 19 January 2024, 10:28 UTC, <http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676> [accessed 23 May 2024]

Chicago style

WikiPatents contributors, "20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676 (accessed May 23, 2024).

CBE/CSE style

WikiPatents contributors. 20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.) [Internet]. WikiPatents, ; 2024 Jan 19, 10:28 UTC [cited 2024 May 23]. Available from: http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676.

Bluebook style

20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.), http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676 (last visited May 23, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676",
   note = "[Online; accessed 23-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240021421. VACUUM DEPOSITION INTO TRENCHES AND VIAS simplified abstract (Ascentool, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240021421._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_simplified_abstract_(Ascentool,_Inc.)&oldid=28676}",
   note = "[Online; accessed 23-May-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"