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Bibliographic details for 20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.)

Citation styles for 20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.)

APA style

20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.). (2024, January 19). WikiPatents, . Retrieved 21:16, June 7, 2024 from http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674.

MLA style

"20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.)." WikiPatents, . 19 Jan 2024, 10:28 UTC. 7 Jun 2024, 21:16 <http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674>.

MHRA style

WikiPatents contributors, '20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.)', WikiPatents, , 19 January 2024, 10:28 UTC, <http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674> [accessed 7 June 2024]

Chicago style

WikiPatents contributors, "20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674 (accessed June 7, 2024).

CBE/CSE style

WikiPatents contributors. 20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.) [Internet]. WikiPatents, ; 2024 Jan 19, 10:28 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674.

Bluebook style

20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.), http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674 (last visited June 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674",
   note = "[Online; accessed 7-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240021411. VACUUM DEPOSITION INTO TRENCHES AND VIAS AND ETCH OF TRENCHES AND VIA simplified abstract (Ascentool, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240021411._VACUUM_DEPOSITION_INTO_TRENCHES_AND_VIAS_AND_ETCH_OF_TRENCHES_AND_VIA_simplified_abstract_(Ascentool,_Inc.)&oldid=28674}",
   note = "[Online; accessed 7-June-2024]"
 }


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