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Bibliographic details for 20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.)
- Page name: 20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 19 January 2024 09:53 UTC
- Date retrieved: 7 June 2024 01:41 UTC
- Permanent URL: http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460
- Page Version ID: 28460
Citation styles for 20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.)
APA style
20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.). (2024, January 19). WikiPatents, . Retrieved 01:41, June 7, 2024 from http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460.
MLA style
"20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.)." WikiPatents, . 19 Jan 2024, 09:53 UTC. 7 Jun 2024, 01:41 <http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460>.
MHRA style
WikiPatents contributors, '20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.)', WikiPatents, , 19 January 2024, 09:53 UTC, <http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460> [accessed 7 June 2024]
Chicago style
WikiPatents contributors, "20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.)," WikiPatents, , http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460 (accessed June 7, 2024).
CBE/CSE style
WikiPatents contributors. 20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.) [Internet]. WikiPatents, ; 2024 Jan 19, 09:53 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460.
Bluebook style
20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.), http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460 (last visited June 7, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460",
note = "[Online; accessed 7-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "20240018648. Purge Ring for Reduced Substrate Backside Deposition simplified abstract (APPLIED MATERIALS, INC.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=20240018648._Purge_Ring_for_Reduced_Substrate_Backside_Deposition_simplified_abstract_(APPLIED_MATERIALS,_INC.)&oldid=28460}",
note = "[Online; accessed 7-June-2024]"
}
