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Bibliographic details for 20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

Citation styles for 20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)

APA style

20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation). (2024, January 12). WikiPatents, . Retrieved 23:11, June 5, 2024 from http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823.

MLA style

"20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)." WikiPatents, . 12 Jan 2024, 05:09 UTC. 5 Jun 2024, 23:11 <http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823>.

MHRA style

WikiPatents contributors, '20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)', WikiPatents, , 12 January 2024, 05:09 UTC, <http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823> [accessed 5 June 2024]

Chicago style

WikiPatents contributors, "20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823 (accessed June 5, 2024).

CBE/CSE style

WikiPatents contributors. 20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) [Internet]. WikiPatents, ; 2024 Jan 12, 05:09 UTC [cited 2024 Jun 5]. Available from: http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823.

Bluebook style

20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation), http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823 (last visited June 5, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823",
   note = "[Online; accessed 5-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240014055. SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM simplified abstract (Kokusai Electric Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240014055._SUBSTRATE_PROCESSING_SYSTEM,_SUBSTRATE_PROCESSING_APPARATUS,_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE,_AND_RECORDING_MEDIUM_simplified_abstract_(Kokusai_Electric_Corporation)&oldid=27823}",
   note = "[Online; accessed 5-June-2024]"
 }


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