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Bibliographic details for 20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Page name: 20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 12 January 2024 05:09 UTC
- Date retrieved: 7 June 2024 00:37 UTC
- Permanent URL: http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818
- Page Version ID: 27818
Citation styles for 20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited)
APA style
20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited). (2024, January 12). WikiPatents, . Retrieved 00:37, June 7, 2024 from http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818.
MLA style
"20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited)." WikiPatents, . 12 Jan 2024, 05:09 UTC. 7 Jun 2024, 00:37 <http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818>.
MHRA style
WikiPatents contributors, '20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited)', WikiPatents, , 12 January 2024, 05:09 UTC, <http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818> [accessed 7 June 2024]
Chicago style
WikiPatents contributors, "20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited)," WikiPatents, , http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818 (accessed June 7, 2024).
CBE/CSE style
WikiPatents contributors. 20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited) [Internet]. WikiPatents, ; 2024 Jan 12, 05:09 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818.
Bluebook style
20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited), http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818 (last visited June 7, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818",
note = "[Online; accessed 7-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "20240014013. PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD simplified abstract (Tokyo Electron Limited) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=20240014013._PLASMA_PROCESSING_APPARATUS_AND_PLASMA_PROCESSING_METHOD_simplified_abstract_(Tokyo_Electron_Limited)&oldid=27818}",
note = "[Online; accessed 7-June-2024]"
}
