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Bibliographic details for 20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)

Citation styles for 20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)

APA style

20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.). (2024, January 11). WikiPatents, . Retrieved 23:47, June 6, 2024 from http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528.

MLA style

"20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)." WikiPatents, . 11 Jan 2024, 10:35 UTC. 6 Jun 2024, 23:47 <http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528>.

MHRA style

WikiPatents contributors, '20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)', WikiPatents, , 11 January 2024, 10:35 UTC, <http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528> [accessed 6 June 2024]

Chicago style

WikiPatents contributors, "20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.)," WikiPatents, , http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528 (accessed June 6, 2024).

CBE/CSE style

WikiPatents contributors. 20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.) [Internet]. WikiPatents, ; 2024 Jan 11, 10:35 UTC [cited 2024 Jun 6]. Available from: http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528.

Bluebook style

20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.), http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528 (last visited June 6, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528",
   note = "[Online; accessed 6-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240011150. METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL simplified abstract (ASML Netherlands B.V.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240011150._METHOD_AND_APPARATUS_FOR_FORMING_A_PATTERNED_LAYER_OF_CARBON,_METHOD_OF_FORMING_A_PATTERNED_LAYER_OF_MATERIAL_simplified_abstract_(ASML_Netherlands_B.V.)&oldid=27528}",
   note = "[Online; accessed 6-June-2024]"
 }


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